不同类型石英玻璃的振动能量损耗特性对比分析

硅酸盐通报 ›› 2022, Vol. 41 ›› Issue (11): 4095-4102.

所属专题：玻璃

• 新型功能玻璃与玻璃新技术、新结构 • 上一篇下一篇

不同类型石英玻璃的振动能量损耗特性对比分析

张晓强¹, 孙元成¹, 贾永雷², 潘瑶², 杜秀蓉¹, 宋学富¹, 祖成奎¹, 朱永昌¹

1.中国建筑材料科学研究总院,北京 100024;
2.国防科技大学前沿交叉学科学院,长沙 410073

收稿日期:2022-10-09 修订日期:2022-10-30 出版日期:2022-11-15 发布日期:2022-12-12
通信作者: 贾永雷,博士,讲师。E-mail:jiayl2016@163.com
作者简介:张晓强(1985—),男,高级工程师。主要从事石英玻璃制备与精密加工方面的研究。E-mail:18701667103@163.com
基金资助:
“十四五”国家重点研发计划(2021YFB3702300);国家自然科学基金重点项目(52032011)

Comparative Analysis of Mechanical Energy Loss in Different Types of Silica Glass

ZHANG Xiaoqiang¹, SUN Yuancheng¹, JIA Yonglei², PAN Yao², DU Xiurong¹, SONG Xuefu¹, ZU Chengkui¹, ZHU Yongchang¹

1. China Building Materials Academy, Beijing 100024, China;
2. Frontier Interdisciplinary College, National University of Defense Technology, Changsha 410073, China

Received:2022-10-09 Revised:2022-10-30 Online:2022-11-15 Published:2022-12-12

摘要/Abstract

摘要： 石英玻璃相对于金属、晶体、陶瓷等大多数固体材料具有更小的机械振动能量损耗,是许多精密测量器件的首选材料。本文测试对比了四种类型(Ⅰ类、Ⅱ类、Ⅲ类和Ⅳ类)石英玻璃的振动能量损耗特性,从材料化学组分和结构缺陷方面分析了石英玻璃本征损耗的影响因素及作用机理。结果表明:Ⅰ类和Ⅱ类石英玻璃的本征损耗显著大于Ⅲ类和Ⅳ类石英玻璃,主要是由金属杂质含量高和气泡等级低造成的;羟基含量不是影响石英玻璃本征损耗的主要因素;表面损耗是石英玻璃器件振动能量损耗的主要来源之一,可以通过湿法刻蚀消除。

关键词: 石英玻璃, 振动能量损耗, 内耗, 机械品质因数, 表面损耗, 本征损耗

Abstract: Compared with most solid materials such as metal, crystal and ceramics, silica glass has lower mechanical energy loss and it is the preferred material for many precision measuring devices. In this paper, the mechanical energy loss of four types of silica glass (Ⅰ, Ⅱ, Ⅲ and Ⅳ) were tested and compared. The influence factors and mechanism of intrinsic loss of silica glass were analyzed from material chemical composition and structural defects. The results show that the intrinsic losses of type Ⅰ and type Ⅱ silica glass are significantly higher than that of type Ⅲ and type Ⅳ silica glass. The main reasons are the high content of metal impurities and low bubble grade. Hydroxyl content is not the main factor that has significant impact on the intrinsic loss of silica glass. Surface loss is one of the main sources of mechanical energy loss of silica glass devices, and wet etching is an effective method to eliminate the surface loss.

Key words: silica glass, mechanical energy loss, internal friction, mechanical quality factor, surface loss, intrinsic loss

中图分类号:

TB321

张晓强, 孙元成, 贾永雷, 潘瑶, 杜秀蓉, 宋学富, 祖成奎, 朱永昌. 不同类型石英玻璃的振动能量损耗特性对比分析[J]. 硅酸盐通报, 2022, 41(11): 4095-4102.

ZHANG Xiaoqiang, SUN Yuancheng, JIA Yonglei, PAN Yao, DU Xiurong, SONG Xuefu, ZU Chengkui, ZHU Yongchang. Comparative Analysis of Mechanical Energy Loss in Different Types of Silica Glass[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2022, 41(11): 4095-4102.

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不同类型石英玻璃的振动能量损耗特性对比分析

Comparative Analysis of Mechanical Energy Loss in Different Types of Silica Glass

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