Research Progress on Multiscale Simulation of Viscosity Characteristics of Synthetic Quartz Glass

doi:10.16552/j.cnki.issn1001-1625.2025.1194

Abstract

Abstract:

In the manufacturing process of integrated circuits， thermal treatment process is one of the critical steps， and the quartz furnace tube， as a core component of thermal treatment equipment， its performance directly impacts the quality and production efficiency of integrated circuits. Synthetic quartz glass， as a key material for quartz furnace tubes， relies heavily on precise control of its high-temperature preparation and forming processes， which are intrinsically linked to viscosity characteristic changes involving the relaxation of microstructures and macroscopic flow behavior. Therefore， this paper systematically reviews multiscale simulation strategies and recent advancements in quartz glass viscosity research. At the microscopic scale， it focuses on evaluating key potential functions used in molecular dynamics （MD） simulations and their predictive accuracy， summarizing the accuracy and limitations of commonly used potential functions in predicting the structure， diffusion coefficients， and viscosity of the silican dioxide system， while reviewing the relevant achievements of influence mechanisms of impurities such as alkali metal ions and hydroxyl groups on synthetic quartz glass viscosity and structural relaxation through molecular dynamics simulations. At the macroscopic scale， it organizes simulation studies based on finite element method （FEM） and computational fluid dynamics （CFD）， analyzing the current status of incorporating viscosity models obtained from microscopic simulations or experiments into simulation software for thermal processing simulations. This paper provides a reference for future research on impurity diffusion laws and high-temperature resistance characteristics in synthetic quartz glass， and offers a theoretical foundation and technical support for high-temperature applications of quartz glass materials.

Key words: synthetic quartz glass, viscosity, multiscale simulation, molecular dynamics, finite element method, computational fluid dynamics

CLC Number:

TQ171.8

ZHOU Jianxin, NIE Lanjian, FAN Jiangwei, JIA Yanan, LIU Ruiwang. Research Progress on Multiscale Simulation of Viscosity Characteristics of Synthetic Quartz Glass[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2026, 45(3): 771-780.

Figures/Tables 6

Fig.1 Relationship curves between viscosity and temperature of quartz glass［8］

Fig.2 Relationship between viscosity and H2O content ［22］

Fig.3 Excess molar volume as a function of composition under different pressures［31］

Fig.4 Geometric shape of glass tube cooling with different cooling rates at inner and outer surfaces［40］

Fig.5 Comparison of fictive temperatures between inner and outer surfaces［40］

Fig.6 Simulation results of quartz glass compression molding［42］

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