细晶氧化铝陶瓷基板的流延成型和显微结构控制研究

硅酸盐通报 ›› 2023, Vol. 42 ›› Issue (9): 3306-3314.

细晶氧化铝陶瓷基板的流延成型和显微结构控制研究

邓佳威¹, 熊新锐¹, 徐协文¹, 刘鹏¹, 杨现锋¹, 谢志鹏²

1.长沙理工大学材料科学与工程学院,长沙 410004;
2.清华大学材料学院新型陶瓷与精细工艺国家重点实验室,北京 100083

收稿日期:2023-05-11 修订日期:2023-05-29 出版日期:2023-09-15 发布日期:2023-09-14
通信作者: 杨现锋,博士,教授。E-mail:yangxfcsut@csust.edu.cn
作者简介:邓佳威(1994—),男,硕士研究生。主要从事工程陶瓷材料方面的研究。E-mail:18075706393@163.com
基金资助:
国家自然科学基金(52172063);江西省重点研发计划(20232BBE50029)

Tape Casting and Microstructure Controlling of Fine Grained Al₂O₃ Ceramic Substrate

DENG Jiawei¹, XIONG Xinrui¹, XU Xiewen¹, LIU Peng¹, YANG Xianfeng¹, XIE Zhipeng²

1. School of Materials Science and Engineering, Changsha University of Science & Technology, Changsha 410004, China;
2. State Key Laboratory of New Ceramic and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100083, China

Received:2023-05-11 Revised:2023-05-29 Online:2023-09-15 Published:2023-09-14

摘要/Abstract

摘要： 采用砂磨工艺获得了亚微米氧化铝复合粉体,用于制备微晶氧化铝陶瓷基板,研究了浆料组成对浆料流变学性质、生坯密度、生坯应力-应变行为的影响,以及烧结制度对平均晶粒尺寸和基板抗弯强度的影响。结果表明,固相含量、R值(增塑剂和黏结剂的质量比)和分散剂用量等关键因素决定了流延浆料的流变学性质。R值增大导致生坯强度和密度降低,提高固相含量有利于增加最大可流延厚度,优化工艺条件下可制备0.16~1.20 mm的坯片。当烧结温度为1 550 ℃、升温速率为2.5 ℃/min、保温时间为60 min时,制备的陶瓷基板平均晶粒尺寸为1.1 μm左右,晶粒尺寸分布均匀,抗弯强度达到(440±25) MPa。

关键词: 氧化铝, 陶瓷基板, 流延成型, 晶粒尺寸, 烧结制度

Abstract: The submicron Al₂O₃ composite powder was obtained by sand milling process, which was used to prepare fine grained Al₂O₃ ceramic substrates. The effect of slurry composition on rheological properties of slurry, bulk density and stress-strain behavior of green tape was investigated, and the influence of sintering schedule on average grain size and flexural strength of ceramic substrate was also studied. The results show that key factors such as solid content, R value (mass ratio of plasticizer to binder) and dispersant dosage determine the rheological properties of slurry. The increase of R value leads to the reduction of tensile strength and density of green tape, and the increase of solid content is beneficial to increase the possible maximum casting thickness. Under the optimized process conditions, 0.16~1.20 mm green sheets can be prepared. At a sintering temperature of 1 550 ℃, a heating rate of 2.5 ℃/min and a holding time of 60 min, the average grain size of the prepared ceramic substrate is about 1.1 μm, the grain size distribution is uniform, and the flexural strength reaches (440±25) MPa.

Key words: Al₂O₃, ceramic substrate, tape casting, grain size, sintering schedule

中图分类号:

TQ174

邓佳威, 熊新锐, 徐协文, 刘鹏, 杨现锋, 谢志鹏. 细晶氧化铝陶瓷基板的流延成型和显微结构控制研究[J]. 硅酸盐通报, 2023, 42(9): 3306-3314.

DENG Jiawei, XIONG Xinrui, XU Xiewen, LIU Peng, YANG Xianfeng, XIE Zhipeng. Tape Casting and Microstructure Controlling of Fine Grained Al₂O₃ Ceramic Substrate[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2023, 42(9): 3306-3314.

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