Effect of Burner Core Number on Properties of CVD Fused Silica Glass

Abstract

Abstract: The effect of the number of burner cores on the properties of CVD fused silica glass was studied by numerical simulations. The distributions of temperature, OH^- concentration and SiO₂ concentration at the deposition surface for the five-core, seven-core and nine-core burners were discussed. The influence law of different hydrogen-oxygen equivalence ratios was also analyzed. The results show that compared with the five-core burner and seven-core burner, the nine-core burner obtains more uniform SiO₂ concentration distribution and temperature distribution at the deposition surface. When a nine-core burner is used, a hydrogen-oxygen equivalence ratio of 1.5 improves the distribution uniformity of temperature, OH^- concentration and SiO₂ concentration on the deposition surface, thus improving the refractive index uniformity of fused silica glass.

Key words: silica glass, burner, chemical vapor deposition, refractive index uniformity, simulation, equivalence ratio

CLC Number:

TQ171

CHEN Yanjun, ZHOU Qian, HUANG Yaosong. Effect of Burner Core Number on Properties of CVD Fused Silica Glass[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2021, 40(12): 4109-4117.

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