Femtosecond Laser Direct Written Waveguides in Ultra-Low Expansion Glass-Ceramics

Abstract

Abstract: Basing on optimized laser parameters, optical waveguides with an insertion loss of 4.94 dB were fabricated in ultra-low expansion glass-ceramics by using femtosecond laser to directly write waveguide method. The structure and transmittance of the glass-ceramics before and after laser irradiation were characterized by Raman spectrometer, X-ray diffractometer and spectrophotometer. The cross-section morphology and element distribution of samples were characterized by SEM and EDS. Based on the 2% (mass fraction) HF dilute solution corrosion test, the chemical corrosion resistance of samples was characterized. The valence states of zirconium and titanium ions in samples were characterized by X-ray photoelectron spectroscopy. The results show that after laser irradiation the chemical corrosion resistance of glass-ceramics decreases, some small and obvious absorption bands appeares in glass-ceramics. Combined with X-ray photoelectron spectroscopy analysis, it is confirmed that these phenomena are caused by the reduction of Zr⁴⁺ or Ti⁴⁺ in glass-ceramics into meta-stable Zr³⁺ or Ti³⁺ with higher chemical activity.

Key words: ultra-low expansion glass-ceramics, femtosecond laser, optical waveguide, photo-reduction, refractive index, chemical corrosion resistance

CLC Number:

TQ171.71

LI Zihuang, GAO Yunzhou, FAN Shigang, GU Shaoxuan, TAO Haizheng. Femtosecond Laser Direct Written Waveguides in Ultra-Low Expansion Glass-Ceramics[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2021, 40(11): 3784-3790.

References

[1] SUGIOKA K. Progress in ultrafast laser processing and future prospects[J]. Nanophotonics, 2017, 6(2): 393-413.
[2] KHALIL A A, BÉRUBÉ J P, DANTO S, et al. Direct laser writing of a new type of waveguides in silver containing glasses[J]. Scientific Reports, 2017, 7: 11124.
[3] KHALIL A A, BÉRUBÉ J P, DANTO S, et al. Comparative study between the standard type I and the type A femtosecond laser induced refractive index change in silver containing glasses[J]. Optical Materials Express, 2019, 9(6): 2640-2651.
[4] DYMSHITS O, SHEPILOV M, ZHILIN A. Transparent glass-ceramics for optical applications[J]. MRS Bulletin, 2017, 42(3): 200-205.
[5] ALEKSEEVA I, DYMSHITS O, TSENTER M, et al. Optical applications of glass-ceramics[J]. Journal of Non-Crystalline Solids, 2010, 356(52/53/54): 3042-3058.
[6] SANTOS M V, SANTOS S N C, MARTINS R J, et al. Femtosecond direct laser writing of silk fibroin optical waveguides[J]. Journal of Materials Science: Materials in Electronics, 2019, 30(18): 16843-16848.
[7] BABU B H, NIU M S, YANG X Y, et al. Systematic control of optical features in aluminosilicate glass waveguides using direct femtosecond laser writing[J]. Optical Materials, 2017, 72: 501-507.
[8] HUGHES M A, HOMEWOOD K P, CURRY R J, et al. Waveguides in Ni-doped glass and glass-ceramic written with a 1 kHz femtosecond laser[J]. Optical Materials, 2014, 36(9): 1604-1608.
[9] WILL M, NOLTE S, CHICHKOV B N, et al. Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses[J]. Applied Optics, 2002, 41(21): 4360-4364.
[10] NGUYEN N T, SALIMINIA A, CHIN S L, et al. Control of femtosecond laser written waveguides in silica glass[J]. Applied Physics B, 2006, 85(1): 145-148.
[11] HOMOELLE D, WIELANDY S, GAETA A L, et al. Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses[J]. Optics Letters, 1999, 24(18): 1311-1313.
[12] TIAN Y M, SHEN L F, PUN E Y B, et al. High-aluminum phosphate glasses for single-mode waveguide-typed red light source[J]. Journal of Non-Crystalline Solids, 2015, 426: 25-31.
[13] CHAN J W, HUSER T R, RISBUD S H, et al. Waveguide fabrication in phosphate glasses using femtosecond laser pulses[J]. Applied Physics Letters, 2003, 82(15): 2371-2373.
[14] CHEN G Y, PIANTEDOSI F, OTTEN D, et al. Femtosecond-laser-written microstructured waveguides in BK₇ glass[J]. Scientific Reports, 2018, 8: 10377.
[15] MIRZA I, BULGAKOVA N M, TOMÁŠTÍK J, et al. Ultrashort pulse laser ablation of dielectrics: thresholds, mechanisms, role of breakdown[J]. Scientific Reports, 2016, 6: 39133.
[16] SATTIBABU R, BHAKTHA B N S, GANGULY P. Estimation of fiber-waveguide coupling loss and waveguide propagation loss by spectral analysis[J]. IEEE Photonics Technology Letters, 2019, 31(7): 517-520.
[17] SCHAFFER C B, BRODEUR A, MAZUR E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Measurement Science and Technology, 2001, 12(11): 1784-1794.
[18] KAISER A, RETHFELD B, VICANEK M, et al. Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses[J]. Physical Review B, 2000, 61(17): 11437-11450.
[19] JIA B R, LI M, YAN X B, et al. Structure investigation of CaO-SiO₂-Al₂O₃-Li₂O by molecular dynamics simulation and Raman spectroscopy[J]. Journal of Non-Crystalline Solids, 2019, 526: 119695.
[20] LIANG T P, ZHANG J H, CHEN H W, et al. Enhanced dielectric properties of Ca²⁺ doped Li-Al-Si photoetchable glass[J]. Ceramics International, 2018, 44(8): 8756-8760.
[21] WANG J, YIN D L, MA J, et al. Pump laser induced photodarkening in ZrO₂-doped Yb:Y₂O₃ laser ceramics[J]. Journal of the European Ceramic Society, 2019, 39(2/3): 635-640.
[22] 王振林,廖思佳,杜云南,等.CeO₂/TiO₂对P₂O₅-B₂O₃-ZnO玻璃的结构和性能的影响[J].重庆理工大学学报(自然科学),2018,32(8):108-114.
WANG Z L, LIAO S J, DU Y N, et al. Effects of CeO₂/TiO₂ on the structure and properties of P₂O₅-B₂O₃-ZnO glass[J]. Journal of Chongqing University of Technology (Natural Science), 2018, 32(8): 108-114 (in Chinese).
[23] GU J L, SHAO Y, BU H T, et al. An abnormal correlation between electron work function and corrosion resistance in Ti-Zr-Be-(Ni/Fe) metallic glasses[J]. Corrosion Science, 2020, 165: 108392.
[24] FANG L L, CHEN J J, ZHANG M, et al. Introduction of Ti³⁺ ions into heterostructured TiO₂ nanotree arrays for enhanced photoelectrochemical performance[J]. Applied Surface Science, 2019, 490: 1-6.
[25] ZHANG H L, WANG D Z, YANG B, et al. XPS measurement for the elements in the interface between oxygen ion irradiated ZrO₂-Y₂O₃ films and iron substrate[J]. Physica Status Solidi (A), 1997, 160(1): 145-150.
[26] RICHTER S, MÖNCKE D, ZIMMERMANN F, et al. Ultrashort pulse induced modifications in ULE-from nanograting formation to laser darkening[J]. Optical Materials Express, 2015, 5(8): 1834-1850.