Abstract: SiF4 is widely used in the electronics industry and the semiconductor industry, preparation of SiF4 by fluorosilicate is a kind of preparation method.In this paper, the properties and preparation methods of fluorosilicate are introduced.The method of preparing SiF4 by fluorosilicate is introduced.The conditions and products of SiF4 prepared by fluorosilicate were compared.

Key words: silicon tetrafluoride;fluorosilicate;dissociation;technology