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BULLETIN OF THE CHINESE CERAMIC SOCIETY ›› 2016, Vol. 35 ›› Issue (12): 3910-3914.

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Effects of Sputtering Time on Photoelectric Property of GZO Films

CONG Fang-ling;ZHAO Qing-nan;LIU Xu;LUO Le-ping;GU Bao-bao;DONG Yu-hong;ZHAO Jie   

  • Online:2016-12-15 Published:2021-01-18

Key words: GZO film;sputtering time;photoelectric property;RF magnetron sputtering

CLC Number: