Influence of Heater/Crucible Position on the Thermal Field and Crystal Quality in the Preparation of Single Crystal Silicon with φ200 mm

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BULLETIN OF THE CHINESE CERAMIC SOCIETY ›› 2016, Vol. 35 ›› Issue (11): 3607-3612.

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Influence of Heater/Crucible Position on the Thermal Field and Crystal Quality in the Preparation of Single Crystal Silicon with φ200 mm

GAO Mang-mang;ZHU Bo;LI Jin;JING Hua-yu;DONG Fa-yun;LIANG Sen;LI Hai-bo

Online:2016-11-15 Published:2021-01-18

Abstract

CLC Number:

TQ127

GAO Mang-mang;ZHU Bo;LI Jin;JING Hua-yu;DONG Fa-yun;LIANG Sen;LI Hai-bo. Influence of Heater/Crucible Position on the Thermal Field and Crystal Quality in the Preparation of Single Crystal Silicon with φ200 mm[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2016, 35(11): 3607-3612.

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Influence of Heater/Crucible Position on the Thermal Field and Crystal Quality in the Preparation of Single Crystal Silicon with φ200 mm

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