Research Progress in Hetero-epitaxial Growth of 3C-SiC on Si Substrate

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BULLETIN OF THE CHINESE CERAMIC SOCIETY ›› 2011, Vol. 30 ›› Issue (5): 1083-1088.

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Research Progress in Hetero-epitaxial Growth of 3C-SiC on Si Substrate

SHI Biao;ZHU Ming-xing;CHEN Yi;LIU Xue-chao;YANG Jian-hua;SHI Er-wei

Online:2011-10-15 Published:2021-01-18

Abstract

CLC Number:

TQ171

SHI Biao;ZHU Ming-xing;CHEN Yi;LIU Xue-chao;YANG Jian-hua;SHI Er-wei. Research Progress in Hetero-epitaxial Growth of 3C-SiC on Si Substrate[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2011, 30(5): 1083-1088.

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Research Progress in Hetero-epitaxial Growth of 3C-SiC on Si Substrate

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