Abstract: In order to improve lapping efficiency and quality of optical materials, a method of hydrophilic fixed abrasive pad (FAP) lapping was introduced. The fixed abrasive pad embedded with diamond abrasives which had a diameter of 5-10 μm was developed through pattern transfer and UV-curing process. Material Removal Rate (MRR) and average surface roughness (Sa) were employed to evaluate the performance of lapping or polishing. The conventional lapping, fixed abrasive pellet lapping, and hydrophilic FAP lapping of K9 glass with the same particle size abrasives were compared. Results show that the MRR of hydrophilic FAP lapping is 350 nm/min and the average surface roughness Sa is 3.24 nm. Both of the two parameters achieve the quality of finish lapping and polishing. Material removal models of fixed abrasive pellet and hydrophilic FAP are concluded through the experiment results. Besides, self-conditioning mechanism of hydrophilic FAP lapping is obtained.

Key words: hydrophilic;fixed abrasive pad (FAP);material removal rate (MRR);self-conditioning