Abstract: In order to improve the low reflectance of polished SSiC, the amorphous Si-C-O-N coating was coated on the surface of SSiC ceramics by RF magnetron sputtering. The as-prepared coating was characterized by XRD, FTIR and XPS, et al. The reflectance was also determined in the visible range. The results show that the coating was composed of Si-N, Si-C and Si-O bondings. The surface defects decrease obviously after polished. The surface roughness yields to angstrom grade. The lowest reflectance in visible range increases to 90%. The scalar scattering theory was used to analyze the cause in increasing the reflectance.

Key words: SSiC;Si-C-O-N coating;reflectance;scalar scattering theory