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BULLETIN OF THE CHINESE CERAMIC SOCIETY ›› 2008, Vol. 27 ›› Issue (1): 42-45.

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Effects of Deposition Temperature to the CVD Si3N4 Coatings on the Quartz

YIN Li-feng;WANG Si-qing;ZHANG Chang-rui;CAO Feng;LI Bin   

  • Online:2008-02-15 Published:2021-01-15

CLC Number: