低结晶BN涂层对连续Si3N4纤维性能的影响

doi:10.16552/j.cnki.issn1001-1625.2024.1605

摘要/Abstract

摘要： 采用化学气相沉积(CVD)工艺在连续Si₃N₄纤维表面制备BN涂层,通过X射线光电子能谱(XPS)、扫描电子显微镜(SEM)和傅里叶红外光谱(FT-IR)等手段分析纤维及其表面BN涂层的物相组成和微观形貌,基于Weibull分布统计方法评估BN涂层对Si₃N₄纤维单丝拉伸强度的影响规律。结果表明:Si₃N₄纤维表面BN涂层具有B/N原子比接近1∶1化学计量比的低结晶结构特征;沉积BN涂层后,纤维单丝拉伸强度分布偏离正态分布,纤维强度离散增大;随着热处理温度升高,BN涂层将逐渐转化为硼硅酸盐玻璃,有效抑制纤维内部气孔孔径和孔体积的增大;BN涂层Si₃N₄纤维的单丝拉伸强度随温度升高下降缓慢,在1 400~1 500 ℃时仍高于无涂层Si₃N₄纤维。

关键词: BN涂层, Si₃N₄纤维, 硼硅酸盐玻璃, 低结晶, 拉伸强度, 化学气相沉积

Abstract: BN coating was deposited on the surface of continuous Si₃N₄ fiber by chemical vapor deposition (CVD). The phase composition and microstructure of the fibers and BN coating were analyzed by X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and Fourier transform infrared spectroscopy (FT-IR). The effect of BN coating on the monofilament tensile strength of Si₃N₄ fibers was evaluated by the Weibull distribution method. The results show that the BN coating on Si₃N₄ fiber has a low-crystallinity structure with a B/N atomic ratio close to 1∶1. After deposition, the monofilament tensile strength distribution deviates from a normal distribution, and the strength dispersion increases. With increasing heat treatment temperature, the BN coating transforms into borosilicate glass, inhibiting the expansion of pore size and volume within the fiber. The strength of BN-coated fibers declines slowly with temperature and remains higher than that of uncoated fibers at 1 400~1 500 ℃.

Key words: BN coating, Si₃N₄ fiber, borosilicate glass, low-crystallinity, tensile strength, chemical vapor deposition

中图分类号:

TQ174

崔冰峡, 江元强, 汪涵, 蔡武集, 黄祥贤, 张安东, 王新斌. 低结晶BN涂层对连续Si₃N₄纤维性能的影响[J]. 硅酸盐通报, 2025, 44(7): 2630-2637.

CUI Bingxia, JIANG Yuanqiang, WANG Han, CAI Wuji, HUANG Xiangxian, ZHANG Andong, WANG Xinbin. Effect of Low-Crystallinity BN Coating on Properties of Continuous Si₃N₄ Fiber[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2025, 44(7): 2630-2637.

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低结晶BN涂层对连续Si₃N₄纤维性能的影响

Effect of Low-Crystallinity BN Coating on Properties of Continuous Si₃N₄ Fiber

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