Bi2O3/B2O3比及β-锂霞石粉对MEMS封接玻璃结构与性能的影响

硅酸盐通报 ›› 2022, Vol. 41 ›› Issue (11): 3990-3996.

所属专题：玻璃

• 封接玻璃与低温共烧陶瓷 • 上一篇下一篇

Bi₂O₃/B₂O₃比及β-锂霞石粉对MEMS封接玻璃结构与性能的影响

王巍巍^1,2, 李金威^1,2, 曹欣^1,2, 杨小菲³, 仲召进^1,2, 倪嘉^1,2

1.中建材玻璃新材料研究院集团有限公司浮法玻璃新技术国家重点实验室,蚌埠 233000;
2.硅基材料安徽省实验室,蚌埠 233000;
3.安徽凯盛基础材料科技有限公司,蚌埠 233000

收稿日期:2022-09-20 修订日期:2022-10-31 出版日期:2022-11-15 发布日期:2022-12-12
通信作者: 曹欣,博士,教授级高级工程师。E-mail:dargoncao@126.com
作者简介:王巍巍(1988—),男,博士研究生。主要从事特种玻璃粉体的研究。E-mail:davidwung47@126.com
基金资助:
国家重点研发计划项目(2021YFB3501103);安徽省重点研究和开发计划项目(202004a05020036,2022a05020026)

Effects of Bi₂O₃/B₂O₃ Ratio and β-Eucryptite Powder on Structure and Properties of MEMS Sealing Glass

WANG Weiwei^1,2, LI Jinwei^1,2, CAO Xin^1,2, YANG Xiaofei³, ZHONG Zhaojin^1,2, NI Jia^1,2

1. State Key Laboratory of Advanced Technology for Float Glass, CNBM Research Institute for Advanced Glass Materials Group Co., Ltd., Bengbu 233000, China;
2. Silica-Based Materials Laboratory of Anhui Province, Bengbu 233000, China;
3. Anhui Triumph Basic Material Technology Co., Ltd., Bengbu 233000, China

Received:2022-09-20 Revised:2022-10-31 Online:2022-11-15 Published:2022-12-12

摘要/Abstract

摘要： 针对微机电系统(MEMS)封接玻璃的性能要求,本文制备了Bi₂O₃-B₂O₃-ZnO-BaO-CuO系无铅玻璃粉,采用拉曼光谱仪、X射线衍射仪、热膨胀仪、烧结影像仪、扫描电子显微镜等测试手段分别表征了Bi₂O₃和B₂O₃物质的量比(n(Bi₂O₃)/n(B₂O₃))和β-锂霞石粉掺量变化对玻璃结构、热学性能、封接温度及微观形貌的影响。结果表明:随着n(Bi₂O₃)/n(B₂O₃)的增大,玻璃结构中[BiO₃]三角体和[BiO₆]八面体单元含量逐渐增多,[BO₄]四面体向[BO₃]三角体转变,导致玻璃网络连接强度减弱、结构变疏松;随着n(Bi₂O₃)/n(B₂O₃)的增大,玻璃热膨胀系数逐渐增大,特征温度和封接温度逐渐降低,但后期变化放缓;随着β-锂霞石粉外掺量的增加,复合玻璃粉的热膨胀系数明显降低,而特征温度和封接温度没有明显升高,但复合玻璃粉的流动性变差。

关键词: 微机电系统, 封接玻璃粉, 低熔点玻璃, β-锂霞石粉, 热膨胀系数, 封接温度

Abstract: A kind of lead-free glass powders based on Bi₂O₃-B₂O₃-ZnO-BaO-CuO system was prepared in this paper for the performance requirements of micro-electromechanical system (MEMS) sealing glass. The effects of Bi₂O₃/B₂O₃ ratio (n(Bi₂O₃)/n(B₂O₃)) and β-eucryptite powder content on the network structure, thermal properties, sealing temperature and sintered micromorphology of MEMS sealing glass were separately studied by Raman spectra, XRD, coefficient of thermal expansion (CTE), sintering image and SEM. The results show that the content of [BiO₃] and [BiO₆] increases with the increase of n(Bi₂O₃)/n(B₂O₃), while the transition from [BO₄] tetrahedron to [BO₃] triangulation leads to the glass network connection strength weak and structure loose. With the increase of n(Bi₂O₃)/n(B₂O₃), the CTE of the glass increases while the characteristic temperature and sealing temperature decrease gradually, but later change slowed. The CTE of the composite glass decreases obviously while the characteristic temperature and sealing temperature change little with the increase of β-eucryptite powder content, at the same time the fluidity of the composite glass powder becomes worse.

Key words: micro-electromechanical system, sealing glass powder, low-melting glass, β-eucryptite powder, coefficient of thermal expansion, sealing temperature

中图分类号:

TQ171

王巍巍, 李金威, 曹欣, 杨小菲, 仲召进, 倪嘉. Bi₂O₃/B₂O₃比及β-锂霞石粉对MEMS封接玻璃结构与性能的影响[J]. 硅酸盐通报, 2022, 41(11): 3990-3996.

WANG Weiwei, LI Jinwei, CAO Xin, YANG Xiaofei, ZHONG Zhaojin, NI Jia. Effects of Bi₂O₃/B₂O₃ Ratio and β-Eucryptite Powder on Structure and Properties of MEMS Sealing Glass[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2022, 41(11): 3990-3996.

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Bi₂O₃/B₂O₃比及β-锂霞石粉对MEMS封接玻璃结构与性能的影响

Effects of Bi₂O₃/B₂O₃ Ratio and β-Eucryptite Powder on Structure and Properties of MEMS Sealing Glass

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