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硅酸盐通报 ›› 2022, Vol. 41 ›› Issue (4): 1404-1415.

• 陶瓷 • 上一篇    下一篇

氮化硅陶瓷在四大领域的研究及应用进展

陈波1, 韦中华2, 李镔2, 王子诚1, 王腾飞1   

  1. 1.中材高新氮化物陶瓷有限公司,淄博 255000;
    2.北京中材人工晶体研究院有限公司,北京 100018
  • 收稿日期:2021-07-24 修回日期:2021-09-04 出版日期:2022-04-15 发布日期:2022-04-27
  • 通讯作者: 韦中华,教授级高工。E-mail:rainbow520521@163.com
  • 作者简介:陈 波(1976—),男,教授级高工。主要从事高性能氮化硅陶瓷性能研究及产业化应用。E-mail:35887370@163.com

Research and Application Progress of Silicon Nitride Ceramics in Four Major Fields

CHEN Bo1, WEI Zhonghua2, LI Bin2, WANG Zicheng1, WANG Tengfei1   

  1. 1. Sinoma Advanced Nitride Ceramics Co., Ltd., Zibo 255000, China;
    2. Beijing Sinoma Synthetic Crystals Co., Ltd., Beijing 100018, China
  • Received:2021-07-24 Revised:2021-09-04 Online:2022-04-15 Published:2022-04-27

摘要: 氮化硅陶瓷不仅具有较高的力学性能还具有良好的透波性能、导热性能以及生物相容性能,是公认的综合性能最优的陶瓷材料。作为轴承球的致密氮化硅陶瓷广泛应用在机械领域;作为透波材料的多孔氮化硅陶瓷广泛应用在航空航天领域;随着对氮化硅陶瓷材料的深入研究,其在导热性和生物相容性方面的优异特性逐渐被科研工作者认识并得到开发和应用。本文详细阐述了氮化硅粉体的制备方法,并综述了氮化硅陶瓷作为结构陶瓷在机械领域和航空航天领域的研究进展,此外还介绍了其作为功能陶瓷在半导体领域、生物制药领域的研究和应用现状,最后对其未来发展进行了展望。

关键词: 氮化硅陶瓷, 轴承球, 透波材料, 氮化硅基板, 生物陶瓷, 多孔材料

Abstract: Silicon nitride ceramics not only have high mechanical properties, but also have strong wave-transmitting properties, high thermal conductivity and biocompatibility, which are regarded as the most excellent ceramic materials. Dense silicon nitride ceramics as bearing balls are widely used in the fields of the engineering industry; porous silicon nitride ceramics as wave-transmitting materials are extensively applied in the fields of the aerospace industry. With the continuous in-depth research on silicon nitride ceramic materials, their excellent properties of high thermal conductivity and biocompatibility have been gradually developed by researchers and their application fields are broadened. This article describes in detail the preparation methods of silicon nitride powder, and reviews the research progress of silicon nitride ceramics as structural ceramics in the areas of machinery, military, and aerospace industries. In addition, it also introduces the application of silicon nitride ceramics as functional ceramics in the fields of semiconductors and biopharmaceuticals. Finally, the future development of silicon nitride ceramics has prospected.

Key words: silicon nitride ceramic, bearing ball, wave-transmitting material, silicon nitride substrate, bioceramics, porous material

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