非接触点胶打印用ZnO-SnO2复合气敏墨水的制备及气敏性能研究

硅酸盐通报 ›› 2024, Vol. 43 ›› Issue (10): 3878-3885.

非接触点胶打印用ZnO-SnO₂复合气敏墨水的制备及气敏性能研究

王建搏¹, 贾明昊¹, 王兴锋¹, 雷鸣², 沈杰³, 金伟¹

1.武汉理工大学硅酸盐建筑材料国家重点实验室,武汉 430070;
2.武汉微纳传感技术有限公司,武汉 430079;
3.武汉理工大学材料科学与工程学院,武汉 430070

收稿日期:2024-04-09 修订日期:2024-05-27 出版日期:2024-10-15 发布日期:2024-10-16
通信作者: 金伟,博士,副研究员。E-mail:jinwei@whut.edu.cn
作者简介:王建搏(1998—),男,硕士研究生。主要从事气体传感器的研究。E-mail:wjb22953@whut.edu.cn
基金资助:
国家自然科学基金(62171331)

Preparation and Gas-Sensitive Performance of ZnO-SnO₂ Composite Gas-Sensitive Inks for Non-Contact Dispenser Printing

WANG Jianbo¹, JIA Minghao¹, WANG Xingfeng¹, LEI Ming², SHEN Jie³, JIN Wei¹

1. State Key Laboratory of Silicate Materials for Architectures, Wuhan University of Technology, Wuhan 430070, China;
2. Wuhan Micro & Nano Sensor Technology Co., Ltd., Wuhan 430079, China;
3. School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China

Received:2024-04-09 Revised:2024-05-27 Published:2024-10-15 Online:2024-10-16

摘要/Abstract

摘要： 非接触点胶打印是一种新型、高精度、无模板、低成本的成膜技术,墨水的理化性质是决定打印薄膜质量的关键,对微电子器件性能有着重要影响。本文采用聚乙二醇400(PEG400)作为分散剂取代传统的高分子量分散剂,以乙二醇和丙三醇为溶剂、ZnO-SnO₂复合气敏材料为功能相制备高性能气敏墨水,并利用非接触点胶技术在基于微电子机械系统(MEMS)的微热板上打印ZnO-SnO₂复合气敏薄膜。根据墨水的黏度及悬浮稳定性,分析了PEG400含量和固含量对墨水理化性质的影响,通过SEM观察薄膜的微观形貌,研究结果表明,当固含量为15%(质量分数,下同)、PEG400含量为6%时,复合气敏墨水具备可打印性及低温烧结成膜特性,制备的复合气敏薄膜厚度均匀,表面平整,边缘规整,对丙酮气体有良好的响应。

关键词: 非接触点胶打印, 复合气敏墨水, ZnO-SnO₂, PEG400, 微热板, 气体传感器

Abstract: Non-contact dispenser printing is a novel, high-precision, template-free, and inexpensive film-forming technique. The quality of printed films is mostly determined by the physicochemical characteristics of the ink, which also have a big effect on the performance of microelectronic devices. In this work, high-performance gas-sensitive ink was made with ZnO-SnO₂ composite gas-sensitive materials as functional phases and ethylene glycol and glycerol as solvents, employing PEG400 as dispersion in place of conventional high molecular weight dispersants. ZnO-SnO₂ composite gas-sensitive films were printed on micro-electromechanical system (MEMS) micro-hotplates using non-contact dispenser method. The effects of PEG400 content and solid content on the physical and chemical properties of ink were discussed by measuring the viscosity, and suspension stability of the ink. The microscopic morphology of the film was observed by SEM. The results show that the composite gas-sensitive ink possesses printability and low-temperature sintering film-forming properties when the solid content is 15% (mass fraction, the same here in after) and the PEG400 content is 6%, and the prepared composite gas-sensitive film is uniform in thickness, with a smooth surface, regular edges, and a good response to acetone gas.

Key words: non-contact dispenser printing, composite gas-sensitive ink, ZnO-SnO₂, PEG400, micro-hotplate, gas sensor

中图分类号:

TP212.2

王建搏, 贾明昊, 王兴锋, 雷鸣, 沈杰, 金伟. 非接触点胶打印用ZnO-SnO₂复合气敏墨水的制备及气敏性能研究[J]. 硅酸盐通报, 2024, 43(10): 3878-3885.

WANG Jianbo, JIA Minghao, WANG Xingfeng, LEI Ming, SHEN Jie, JIN Wei. Preparation and Gas-Sensitive Performance of ZnO-SnO₂ Composite Gas-Sensitive Inks for Non-Contact Dispenser Printing[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2024, 43(10): 3878-3885.

参考文献

[1] NIU G Q, WANG F. A review of MEMS-based metal oxide semiconductors gas sensor in mainland China[J]. Journal of Micromechanics and Microengineering, 2022, 32(5): 054003.
[2] AHMAD A M I, HASAN M N, AHMAD F M R, et al. MEMS gas sensors: a review[J]. IEEE Sensors Journal, 2021, 21(17): 18381-18397.
[3] AZZELLINO G, GRIMOLDI A, BINDA M, et al. Organic photodetectors: fully inkjet-printed organic photodetectors with high quantum yield[J]. Advanced Materials, 2013, 25(47): 6828.
[4] BHANDARU N, GOOHPATTADER P S, FARUQUI D, et al. Solvent-vapor-assisted dewetting of prepatterned thin polymer films: control of morphology, order, and pattern miniaturization[J]. Langmuir: the ACS Journal of Surfaces and Colloids, 2015, 31(10): 3203-3214.
[5] DE GANS B J, SCHUBERT U S. Inkjet printing of well-defined polymer dots and arrays[J]. Langmuir: the ACS Journal of Surfaces and Colloids, 2004, 20(18): 7789-7793.
[6] GAO M, LI L H, SONG Y L. Inkjet printing wearable electronic devices[J]. Journal of Materials Chemistry C, 2017, 5(12): 2971-2993.
[7] ALI-SHAH M, LEE D G, LEE B Y, et al. Classifications and applications of inkjet printing technology: a review[J]. IEEE Access, 2021, 9: 140079-140102.
[8] ZHAO X L, EVANS J R G, EDIRISINGHE M J, et al. Direct ink-jet printing of vertical walls[J]. Journal of the American Ceramic Society, 2002, 85(8): 2113-2115.
[9] HAN F, CAO M, LIN J L, et al. Selection of dispersant and dispersion mechanism of PVP on copper powders[J]. Colloid and Polymer Science, 2024, 302(3): 355-362.
[10] HE R J, HU P, ZHANG X H, et al. Preparation of high solid loading, low viscosity ZrB₂-SiC aqueous suspensions using PEI as dispersant[J]. Ceramics International, 2013, 39(3): 2267-2274.
[11] AL-SHBOUL A, KETABI M, SKAF D, et al. Graphene inks printed by aerosol jet for sensing applications: the role of dispersant on the inks' formulation and performance[J]. Sensors, 2023, 23(16): 7151.
[12] GAO H Y, WEI D D, LIN P F, et al. The design of excellent xylene gas sensor using Sn-doped NiO hierarchical nanostructure[J]. Sensors and Actuators B: Chemical, 2017, 253: 1152-1162.
[13] FENG C H, LI X, WANG C, et al. Facile synthesis benzene sensor based on V₂O₅-doped SnO₂ nanofibers[J]. RSC Advances, 2014, 4(88): 47549-47555.
[14] ARYA P, WU Y C, WANG F, et al. Wetting behavior of inkjet-printed electronic inks on patterned substrates[J]. Langmuir: the ACS Journal of Surfaces and Colloids, 2024, 40(10): 5162-5173.
[15] CHAO J L, SHI R Z, GUO Y L, et al. Preparation and properties of inkjet waterborne coatings[J]. Coatings, 2022, 12(3): 357.
[16] HSIEH Y C, WANG H Y, TSO K C, et al. Development of IrO₂ bio-ink for ink-jet printing application[J]. Ceramics International, 2019, 45(13): 16645-16650.
[17] BHANOT C, TRIVEDI S, GUPTA A, et al. Dynamic viscosity versus probe-reported microviscosity of aqueous mixtures of poly(ethylene glycol)[J]. The Journal of Chemical Thermodynamics, 2012, 45(1): 137-144.
[18] IGUCHI M, HIRAGA Y, KASUYA K, et al. Viscosity and density of poly(ethylene glycol) and its solution with carbon dioxide at 353.2 K and 373.2 K at pressures up to 15 MPa[J]. The Journal of Supercritical Fluids, 2015, 97: 63-73.
[19] TANG Z Y, FANG K J, SONG Y W, et al. Jetting performance of polyethylene glycol and reactive dye solutions[J]. Polymers, 2019, 11(4): 739.
[20] JI H C, ZENG W, LI Y Q. Gas sensing mechanisms of metal oxide semiconductors: a focus review[J]. Nanoscale, 2019, 11(47): 22664-22684.

非接触点胶打印用ZnO-SnO₂复合气敏墨水的制备及气敏性能研究

Preparation and Gas-Sensitive Performance of ZnO-SnO₂ Composite Gas-Sensitive Inks for Non-Contact Dispenser Printing

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