燃烧器芯数对CVD熔石英玻璃性能的影响

摘要/Abstract

摘要： 本文通过数值模拟研究了燃烧器芯数对CVD熔石英玻璃性能的影响,讨论了采用五芯、七芯和九芯三种结构燃烧器时沉积面上的温度、OH^-浓度及SiO₂浓度分布,并分析了不同氢氧当量比的影响规律。结果表明:相比于五芯结构燃烧器和七芯结构燃烧器,采用九芯结构燃烧器可以在沉积面获得更加均匀的SiO₂浓度分布和温度分布;当使用九芯燃烧器时,氢氧当量比为1.5可以提高沉积面上温度、OH^-浓度和SiO₂浓度的分布均匀性,从而有利于提高熔石英玻璃的折射率均匀性。

关键词: 石英玻璃, 燃烧器, 化学气相沉积, 折射率均匀性, 模拟, 当量比

Abstract: The effect of the number of burner cores on the properties of CVD fused silica glass was studied by numerical simulations. The distributions of temperature, OH^- concentration and SiO₂ concentration at the deposition surface for the five-core, seven-core and nine-core burners were discussed. The influence law of different hydrogen-oxygen equivalence ratios was also analyzed. The results show that compared with the five-core burner and seven-core burner, the nine-core burner obtains more uniform SiO₂ concentration distribution and temperature distribution at the deposition surface. When a nine-core burner is used, a hydrogen-oxygen equivalence ratio of 1.5 improves the distribution uniformity of temperature, OH^- concentration and SiO₂ concentration on the deposition surface, thus improving the refractive index uniformity of fused silica glass.

Key words: silica glass, burner, chemical vapor deposition, refractive index uniformity, simulation, equivalence ratio

中图分类号:

TQ171

陈彦君, 周倩, 黄耀松. 燃烧器芯数对CVD熔石英玻璃性能的影响[J]. 硅酸盐通报, 2021, 40(12): 4109-4117.

CHEN Yanjun, ZHOU Qian, HUANG Yaosong. Effect of Burner Core Number on Properties of CVD Fused Silica Glass[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2021, 40(12): 4109-4117.

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