超低膨胀微晶玻璃中飞秒激光直写波导探索

硅酸盐通报 ›› 2021, Vol. 40 ›› Issue (11): 3784-3790.

超低膨胀微晶玻璃中飞秒激光直写波导探索

李子煌¹, 高运周², 范仕刚³, 顾少轩¹, 陶海征¹

1.武汉理工大学硅酸盐建筑材料国家重点实验室,武汉 430070;
2.四川神光石英科技有限公司,绵阳 621700;
3.北京中材人工晶体研究院有限公司,北京 100018

收稿日期:2021-05-03 修回日期:2021-06-02 出版日期:2021-11-15 发布日期:2021-12-08
通讯作者: 陶海征,博士,教授。E-mail:thz@whut.edu.cn
作者简介:李子煌(1993—),男,硕士研究生。主要从事微晶玻璃方面的研究。E-mail:522976462@qq.com
基金资助:
国家自然科学基金(51772223);武汉理工大学研究生优秀学位论文培育项目(2018-YS-002)

Femtosecond Laser Direct Written Waveguides in Ultra-Low Expansion Glass-Ceramics

LI Zihuang¹, GAO Yunzhou², FAN Shigang³, GU Shaoxuan¹, TAO Haizheng¹

1. State Key Laboratory of Silicate Materials for Architectures, Wuhan University of Technology, Wuhan 430070, China;
2. Sichuan Shenguang Quartz Science and Technology Co., Ltd., Mianyang 621700, China;
3. Beijing Sinoma Synthetic Crystals Co., Ltd., Beijing 100018, China

Received:2021-05-03 Revised:2021-06-02 Online:2021-11-15 Published:2021-12-08

摘要/Abstract

摘要： 采用飞秒激光直写显微加工方法,基于优化的激光参数,在超低膨胀微晶玻璃中制备了插入损耗为4.94 dB的单线型波导。利用拉曼散射光谱仪、X射线衍射仪和分光光度计对激光辐照前后微晶玻璃的结构及透过率进行了表征,利用扫描电镜和能谱仪表征了样品的截面形貌及元素分布,基于2%(质量分数)HF稀溶液腐蚀试验,对样品的抗化学腐蚀能力进行了表征,利用X射线光电子能谱仪对样品中锆离子和钛离子的价态进行了表征。结果表明,微晶玻璃经激光辐照后抗化学腐蚀性能下降,透过光谱中出现了微小但不可忽略的吸收带。结合X射线光电子能谱分析,证实这些现象是由微晶玻璃中Zr⁴⁺或Ti⁴⁺受激光辐照还原为具有更高化学活性的低价亚稳Zr³⁺或Ti³⁺造成的。

关键词: 超低膨胀微晶玻璃, 飞秒激光, 光波导, 光还原, 折射率, 抗化学腐蚀性能

Abstract: Basing on optimized laser parameters, optical waveguides with an insertion loss of 4.94 dB were fabricated in ultra-low expansion glass-ceramics by using femtosecond laser to directly write waveguide method. The structure and transmittance of the glass-ceramics before and after laser irradiation were characterized by Raman spectrometer, X-ray diffractometer and spectrophotometer. The cross-section morphology and element distribution of samples were characterized by SEM and EDS. Based on the 2% (mass fraction) HF dilute solution corrosion test, the chemical corrosion resistance of samples was characterized. The valence states of zirconium and titanium ions in samples were characterized by X-ray photoelectron spectroscopy. The results show that after laser irradiation the chemical corrosion resistance of glass-ceramics decreases, some small and obvious absorption bands appeares in glass-ceramics. Combined with X-ray photoelectron spectroscopy analysis, it is confirmed that these phenomena are caused by the reduction of Zr⁴⁺ or Ti⁴⁺ in glass-ceramics into meta-stable Zr³⁺ or Ti³⁺ with higher chemical activity.

Key words: ultra-low expansion glass-ceramics, femtosecond laser, optical waveguide, photo-reduction, refractive index, chemical corrosion resistance

中图分类号:

TQ171.71

李子煌, 高运周, 范仕刚, 顾少轩, 陶海征. 超低膨胀微晶玻璃中飞秒激光直写波导探索[J]. 硅酸盐通报, 2021, 40(11): 3784-3790.

LI Zihuang, GAO Yunzhou, FAN Shigang, GU Shaoxuan, TAO Haizheng. Femtosecond Laser Direct Written Waveguides in Ultra-Low Expansion Glass-Ceramics[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2021, 40(11): 3784-3790.

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