关键词: 化学气相沉积;六方氮化硼;涂层;工艺;应用

Abstract: Hexagonal boron nitride(h-BN) coating is one of the most promising functional ceramics due to its remarkable properties.In this paper, the preparation process of h-BN coating by chemical vapor deposition ( CVD ) was introduced, and the excellent performances and applications were reviewed. Moreover, the development trend of the research was prospected.Several problems in the CVD process of h-BN coating were discussed such as the defect of the boron nitride precursors, the complexity of the deposition mechanism, the poor controllability and high cost of the process.In order to realize the industrialization and application of the h-BN coating by CVD, it is recommended to have a more in-depth research in the fields of precursor, deposition mechanism, optimization and scale-up of the process.

Key words: chemical vapor deposition;hexagonal boron nitride;coating;process;application