Nb2O5掺杂ZnO超高致密度陶瓷靶材的制备

硅酸盐通报 ›› 2017, Vol. 36 ›› Issue (9): 3150-3154.

Nb2O5掺杂ZnO超高致密度陶瓷靶材的制备

王晨;董磊;尚福亮;高玲;杨海涛

深圳大学材料学院,深圳,518060

出版日期:2017-09-15 发布日期:2021-01-18
基金资助:
深圳市基础研究项目(JCYJ20160422144751573,JCYJ20160422104921235,JCYJ20140418181958489)

Preparation of Nb2 O5-doped ZnO Ultrahigh Density Ceramic Targets

WANG Chen;DONG Lei;SHANG Fu-liang;GAO Ling;YANG Hai-tao

Online:2017-09-15 Published:2021-01-18

摘要/Abstract

摘要： 采用传统的固相烧结技术制备了Nb2 O5掺杂ZnO陶瓷靶材,研究了不同烧结温度、Nb2 O5掺杂量对NZO靶材的电学性能、相对密度、抗弯强度的影响.结果表明:当烧结温度1200℃,Nb2 O5的掺杂量为0.4wt%时,其综合性能最佳,此时靶材电阻率为0.189Ω·cm,相对密度为99.46%,抗弯强度141.74 MPa.

关键词: 陶瓷靶材;烧结;掺杂;ZnO

Abstract: Nb2 O5-doped ZnO targets were prepared by traditional solid-state sintering method .The effects of the different sintering temperatures and Nb 2 O5-doped amount on the electrical properties , the relative density as well as the bending resistance of the sintered target were studied .The results show that the target can reach the best comprehensive properties including a resistivity of 0.189 Ω· cm, a relative density of 99 .46%and a bending strength of 141 .74 MPa when the sintering temperature is 1200 ℃and Nb2 O5 doping amount is 0.4wt%.

Key words: ceramic target;sintering;doping;ZnO

中图分类号:

TM283
TF125

王晨;董磊;尚福亮;高玲;杨海涛. Nb2O5掺杂ZnO超高致密度陶瓷靶材的制备[J]. 硅酸盐通报, 2017, 36(9): 3150-3154.

WANG Chen;DONG Lei;SHANG Fu-liang;GAO Ling;YANG Hai-tao. Preparation of Nb2 O5-doped ZnO Ultrahigh Density Ceramic Targets[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2017, 36(9): 3150-3154.