关键词: FTO薄膜;过渡层;渐变膜层;在线镀膜;常压化学气相沉积法

Abstract: A single layer of Si/Sn hybrid transition film has been prepared by online APCVD coating method on FTO glass , using various methods to test some properties such as transmittance of visible light , square resistance , surface structure and longitudinal element distribution , to study the influence of the structure composition on the properties .The result shows that the content of Sn in the film decreases gradually from the surface to the base glass , and the content of Si increases gradually , it is a good layer of SiO2/SnO2 gradient structure; The transmittance of the visible light is mainly determined by the structure of the film .Within a certain range , the transmittance of the visible light can be changed by adjusting the gradient structure of the film; The density and structure change of the surface layer can improve the conductivity of the film;It can be used as the transition layer of FTO coated glass .

Key words: FTO film;transition layer;gradient film;online coating;APCVD