关键词: 高纯硅微粉;电感耦合等离子体串联质谱;杂质元素;原位质量;质量转移

Abstract: This work demonstrates the potential application of inductively coupled plasma tandem mass spectrometry (ICP-MS/MS)in multi-element analysis. 8 impurity elements of Na,Mg,Al,K,Ti,Fe, Cu and Zn in high purity silica micro powder are determined by ICP-MS/MS after digested using the microwave and HF+HNO3 mixture. Polyatomic interferences on the analytes are removed by the reaction of target ions with NH3/He in the collision/reaction cell (CRC)of the ICP-MS/MS in MS/MS mode. Na,Mg,Al,K and Zn are determined using NH3/He on-mass. Ti,Fe and Cu are determined by based on NH3/He mass shift. Moreover,the effect of NH3/He flow rate in CRC on the analysis result of analytes is investigated and the NH3/He flow rate is optimized. Using Sc as internal standard element, the errors caused by changes in sample transport,nebulization efficiency and signal intensity can be corrected. The detection limits for analytes are in the range of 0. 001-0. 76 μg/L. The accuracy and precision of the analytical method are assessed by the analysis of the standard reference material quartzite(GBW07835),which shows good agreement with the certified values,and the RSDs are all less than or equal to 5. 5% for analytes. The method shows good accuracy and high precision for the detection of impurity elements in high purity silica micro powder.

Key words: high purity silica micro powder;inductively coupled plasma tandem mass spectrometry;impurity elements;on-mass;mass shift