关键词: 退火;SiO_2薄膜;光学性能;力学性能;扫描电镜

Abstract: The SiO_2 thin film deposited on CAB glass substrate by the means of physical vacuum deposition technology was annealed 600 ℃, then the SiO_2 thin film's mechanical property, optical quality and facial morphology were investigated after 20 d aging time under different atmospheres. The results are followed: annealing and aging atmosphere have effects on the properties of SiO_2 thin film's configuration changed, but all the thin films' fraction coefficient is lower than CAB glass substrate, the annealed thin films' hardness is higher than the un-annealed thin films'; The thin film effectively anti-reflect in the visible range, after the annealed treatment, IR transmission is improved. The results showed the SiO_2 thin film can effectively protect the CAB glass from scratch, on the basis of increasing transmission in the range of visible light.

Key words: annealing;SiO_2 thin film;optical property;mechanical character;SEM