Research Status and Development of Sealing Technology in Vacuum Glass

Abstract

Abstract: Due to excellent properties such as thermal insulation, sound insulation, lightness and anti-condensation, vacuum glass has been gradually used in energy-saving building, household appliances, traffic, agriculture, etc. Especially, the vacuum glass shows broad development prospects in the field of energy-saving buildings. In this paper, the development history of vacuum glass was reviewed. Then, the research foundation of vacuum glass, the major breakthrough progress and industrialization status of industrialization technology were introduced. Moreover, the sealing materials and sealing technologies of vacuum glass and the latest research progress were mainly described. Finally, the future development of sealing materials and sealing technologies in vacuum glass were prospected in order to provide reference for the basic research and industrial application of high performance vacuum glass.

Key words: energy-saving glass, vacuum glass, sealing material, sealing technology, anode bonding technology

CLC Number:

TQ171

LI Shenhou, LOU Jing, WANG Congxiao, YANG Jianqiang, LI Jiang, NIU Hao, YANG Yu, SONG Xiaozhen. Research Status and Development of Sealing Technology in Vacuum Glass[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2022, 41(11): 3893-3900.

References

[1] MARTIN R,MARCELL R M S,MARIA B,等.建筑物的温室气体排放——有效缓解气候变化的潜在挑战[J].建筑节能,2020,48(1):146.
MARTIN R, MARCELL R M S,MARIA B, et al. Embodied GHG emissions of buildings—the hidden challenge for effective climate change mitigation[J]. Building Energy Efficiency, 2020, 48(1): 146 (in Chinese).
[2] 清华大学建筑节能研究中心.中国建筑节能年度发展研究报告2022[R].2022
THUBERC. 2022 annual report on china building energy efficiency[R]. 2022 (in Chinese).
[3] 邢光雪.被动式超低能耗建筑热舒适及围护热损失研究[D].青岛:山东科技大学,2020.
XING G X. Research on thermal comfort and enclosure heat loss of passive ultra-low-energy buildings[D]. Qingdao: Shandong University of Science and Technology, 2020 (in Chinese).
[4] CUCE E. Development of innovative window and fabric technologies for lowcarbon buildings[D]. Nottingham: The University of Nottingham, 2014.
[5] 杨辉,杨闯,郭兴忠,等.建筑节能门窗及技术研究现状[J].新型建筑材料,2012,39(9):84-89.
YANG H, YANG C, GUO X Z, et al. Energy-saving doors and windows and current technology research status[J]. New Building Materials, 2012, 39(9): 84-89 (in Chinese).
[6] 韩乐.玻璃在建筑节能中应用浅析[J].玻璃,2020,47(7):59-62.
HAN L. Brief analysis on the application of glass in energy saving of building[J]. Glass, 2020, 47(7): 59-62 (in Chinese).
[7] 邹贇涵,奚小波,张翼夫,等.真空玻璃技术现状与发展趋势[J].真空科学与技术学报,2022,42(8):563-572.
ZOU Y H, XI X B, ZHANG Y F, et al. Status and development trend of vacuum glazing technology[J]. Chinese Journal of Vacuum Science and Technology, 2022, 42(8): 563-572 (in Chinese).
[8] 管长征,胡东方.支撑物对钢化真空玻璃传热影响的研究[J].节能技术,2022,40(3):233-237.
GUAN C Z, HU D F. Research on the influence of supports on the heat transfer of tempered vacuum glass[J]. Energy Conservation Technology, 2022, 40(3): 233-237 (in Chinese).
[9] 赵洪凯,张超,窦睿智.真空玻璃的支撑与封接技术研究进展[J].真空科学与技术学报,2021,41(5):403-407.
ZHAO H K, ZHANG C, DOU R Z. Recent progress of support and sealing technology of vacuum glass[J]. Chinese Journal of Vacuum Science and Technology, 2021, 41(5): 403-407 (in Chinese).
[10] ZOLLER F. Hollow pane of glass: DE 387655[P]. 1924.
[11] ROBINSON S J, COLLINS R E. Evacuated windows theory and practice[C]. Kobe: ISES Solar World Congress, 1989.
[12] COLLINS R E, FISCHER-CRIPPS A C, TANG J Z. Transparent evacuated insulation[J]. Solar Energy, 1992, 49(5): 333-350.
[13] 李宏彦.被动房中全钢化真空玻璃成为节能减霾利器[J].建设科技,2016(17):52-56.
LI H Y. The fully tempered vacuum glass in the passive room has become a powerful tool for energy saving and haze reduction[J]. Construction Science and Technology, 2016(17): 52-56 (in Chinese).
[14] 李要辉,王晋珍,于萍,等.真空玻璃用低熔点封接玻璃结构、性能优化设计研究[J].硅酸盐通报,2017(增刊):217-222.
LI Y H, WANG J Z, YU P, et al. Optimized design on structure and properties of low melting sealing glass used in vacuum glass[J]. Bulletin of the Chinese Ceramic Society, 2017 (Supplement): 217-222 (in Chinese).
[15] 陈鹏.钒碲铋系低熔点玻璃制备与真空玻璃封装工艺研究[D].武汉:武汉理工大学,2020.
CHEN P. Preparation of the low melting glass in the V₂O₅-TeO₂-Bi₂O₃ system and packaging technology of vacuum glazing[D]. Wuhan: Wuhan University of Technology, 2020 (in Chinese).
[16] 刘逸寒.低温烧结型银浆料的制备及其在钢化玻璃连接上的应用研究[D].哈尔滨:哈尔滨工业大学,2019.
LIU Y H. Preparation of low temperature sintered silver paste and its application research on tempered glass joining[D]. Harbin: Harbin Institute of Technology, 2019 (in Chinese).
[17] 国家市场监督管理总局,国家标准化管理委员会.真空玻璃:GB/T 38586—2020[S].北京:中国标准出版社,2020.
State Administration for Market Regulation, Standardization Administration. Vacuum glass: GB/T 38586—2020[S]. Beijing: Standards Press of China, 2020 (in Chinese).
[18] 万剑,刘同心,陈鹏.ZnO对V₂O₅-TeO₂-B₂O₃-Bi₂O₃系玻璃封接性能的影响[J].玻璃搪瓷与眼镜,2020,48(3):1-6+34.
WAN J, LIU T X, CHEN P. Effect of ZnO on the sealing performance of V₂O₅-TeO₂-B₂O₃-Bi₂O₃ glass[J]. Glass Enamel ＆ Ophthalmic Optics, 2020, 48(3): 1-6+34 (in Chinese).
[19] 刘峻,朱敏红.真空平板玻璃的性能及制造技术研究[J].装备制造技术,2014(12):165-167.
LIU J, ZHU M H. Study on the properties and manufacturing technology of vacuum plate glass[J]. Equipment Manufacturing Technology, 2014(12): 165-167 (in Chinese).
[20] 张伟.磷酸盐封接玻璃的制备与性能研究[D].济南:济南大学,2016.
ZHANG W. Preparation and properties of phosphate sealing glasses[D]. Jinan: University of Jinan, 2016 (in Chinese).
[21] 卢振华.一种用有机物和玻璃制造真空玻璃的生产工艺:CN108516704A[P].2018-09-11.
LU Z H. A production process of vacuum glass made of organic matter and glass: CN108516704A[P]. 2018-09-11 (in Chinese).
[22] 李凌杰,唐金胜.一种用有机物和玻璃制造真空玻璃的生产工艺:CN113387602A[P].2021-09-14.
LI L J, TANG J S. Manufacture process of vacuum glass from organic matter and glass: CN113387602A[P]. 2021-09-14 (in Chinese).
[23] 李宏彦,和春霞.长寿命被动房用钢化真空玻璃[J].建设科技,2015(19):37-39.
LI H Y, HE C X. Toughened vacuum glass for long-life passive housing[J]. Construction Science and Technology, 2015(19): 37-39 (in Chinese).
[24] 高淑兰,嵇书伟,王铁华.浅析中空玻璃惰性气体泄露的原因及解决方案[J].玻璃,2008,35(12):35-39.
GAO S L, JI S W, WANG T H. Discussion on the leakage causes of inert gas filled in insulating glass unit and its solutions[J]. Glass, 2008, 35(12): 35-39 (in Chinese).
[25] RUSSELL A L, ZHANG L, GU Y B. Method of sealing a glass envelope: US9123715[P]. 2015-09-01.
[26] 王思醇,陈奎,李文明,等.硼硅玻璃与可伐合金的封接机理与工艺探索[J].电镀与涂饰,2019,38(24):1329-1336.
WANG S C, CHEN K, LI W M, et al. Borosilicate glass to Kovar alloy sealing mechanism and technology[J]. Electroplating ＆ Finishing, 2019, 38(24): 1329-1336 (in Chinese).
[27] 朱赞涛.浮法玻璃与4J50铁镍合金的封接[D].长沙:中南大学,2014.
ZHU Z T. Float glass to 4J50Fe-Ni alloy seal[D]. Changsha: Central South University, 2014 (in Chinese)
[28] 庞子明.真空电场辅助玻璃与金属的扩散连接界面行为及力学性能研究[D].太原:太原理工大学,2021.
PANG Z M. Study on interface behavior and mechanical properties of glass and metal diffusion-assisted by vacuum electric field[D]. Taiyuan: Taiyuan University of Technology, 2021 (in Chinese).
[29] 陈大明,胡利方,薛永志,等.Al-glass-Al阳极键合界面及力学性能的分析[J].焊接学报,2018,39(9):71-75+132.
CHEN D M, HU L F, XUE Y Z, et al. Interfacial investigation and mechanical properties of Al-glass-Al anodic bonding process[J]. Transactions of the China Welding Institution, 2018, 39(9): 71-75+132 (in Chinese).
[30] SUN Q, SUN G J, LIU Y H, et al. Microstructure and properties of a vacuum-tempered glass with low-temperature-sintered silver paste[J]. Journal of Materials Science: Materials in Electronics, 2021, 32(12): 16230-16241.
[31] 王翔.V₂O₅-P₂O₅-Bi₂O₃系低熔点玻璃粉的制备及性能研究[D].西安:西安工程大学,2017.
WANG X. Study on preparation and properties of low melting point glass frit of V₂O₅-P₂O₅-Bi₂O₃ system[D]. Xi'an: Xi'an Polytechnic University, 2017 (in Chinese).
[32] 苏柳梅,叶肖鑫,樊星,等.氧化物添加剂对P₂O₅-ZnO-B₂O₃系低熔点玻璃物化性能的影响[J].玻璃与搪瓷,2011,39(1):1-5.
SU L M, YE X X, FAN X, et al. Effect of oxide additives on physicochemical properties of low melting P₂O₅-ZnO-B₂O₃ glass[J]. Glass ＆ Enamel, 2011, 39(1): 1-5 (in Chinese).
[33] 徐佳佳.Bi系低熔点玻璃的制备与性能研究[D].武汉:武汉理工大学,2019.
XU J J. Study on preparation and properties of Bi-based low melting point glass[D]. Wuhan: Wuhan University of Technology, 2019 (in Chinese).
[34] KOUDELKA L, ŠUBČK J, MOŠNER P, et al. Structure and properties of Sb₂O₃-containing zinc borophosphate glasses[J]. Journal of Non-Crystalline Solids, 2007, 353(18/19/20/21): 1828-1833.
[35] 罗凌虹,刘亮光,程亮,等.B₂O₃引入量对SiO₂-Al₂O₃-BaO-CaO-B₂O₃系封接玻璃性能影响[J].建筑材料学报,2019,22(5):742-749.
LUO L H, LIU L G, CHENG L, et al. Influence of B₂O₃ content on properties of SiO₂-Al₂O₃-BaO-CaO-B₂O₃ seal glass[J]. Journal of Building Materials, 2019, 22(5): 742-749 (in Chinese).
[36] SHIH P Y. Thermal, chemical and structural characteristics of erbium-doped sodium phosphate glasses[J]. Materials Chemistry and Physics, 2004, 84(1): 151-156.
[37] SHYU J J, YEH C H. Formation and properties of SnO-MgO-P₂O₅ glasses[J]. Journal of Materials Science, 2007, 42(13): 4772-4777.
[38] 周阳.真空微晶玻璃无铅焊料封接工艺研究[D].扬州:扬州大学,2016.
ZHOU Y. Study on sealing process of vacuum glass-ceramics with lead-free solder[D]. Yangzhou: Yangzhou University, 2016 (in Chinese).
[39] SUN Q, YANG W C, LIU Y H, et al. Microstructure and mechanical properties of tempered glass joint bonded with Bi-B-Zn low melting glass[J]. Journal of Materials Processing Technology, 2019, 271: 404-412.
[40] BENSON D K, TRACY C E. Laser sealed vacuum insulation window: US4683154[P]. 1987-07-28.
[41] RICHTER S, NOLTE S, TÜNNERMANN A. Ultrashort pulse laser welding—a new approach for high- stability bonding of different glasses[J]. Physics Procedia, 2012, 39: 556-562.
[42] 刘峻,张剑峰.真空玻璃激光焊接的金相组织及影响因素研究[J].农业装备技术,2017,43(1):10-13.
LIU J, ZHANG J F. Study on metallographic structure and influencing factors of vacuum plate glass[J]. Agricultural Equipment ＆ Technology, 2017, 43(1): 10-13 (in Chinese).
[43] 庞子明,胡利方,贾旭,等.基于阳极键合的玻璃与Kovar合金连接[J].热加工工艺,2023(1):119-122.
PANG Z, HU L F, JIA X, et al. Connection of glass and Kovar alloy based on anodic bonding[J]. Hot Working Technology, 2023(1): 119-122 (in Chinese).
[44] 陈大明,胡利方,时方荣,等.硅-玻璃-硅阳极键合机理及力学性能[J].焊接学报,2019,40(2):123-127+166.
CHEN D M, HU L F, SHI F R, et al. Mechanism and mechanical property of Si-glass-Si anodic bonding process[J]. Transactions of the China Welding Institution, 2019, 40(2): 123-127+166 (in Chinese).
[45] LI H, YU H T, CHEN P, et al. Glass forming region and bonding mechanism of low-melting V₂O₅-TeO₂-Bi₂O₃ glass applied in vacuum glazing sealing[J]. Journal of the American Ceramic Society, 2021, 104(10): 5050-5066.
[46] 卢佳.真空玻璃的阳极键合密封技术研究[D].哈尔滨:哈尔滨工业大学,2008.
LU J. Study on hermetic EDGE sealing of anodic bonding for vacuum glazing[D]. Harbin: Harbin Institute of Technology, 2008 (in Chinese).
[47] 杜超,刘翠荣,阴旭,等.阳极键合研究现状及影响因素[J].材料科学与工艺,2018,26(5):82-88.
DU C, LIU C R, YIN X, et al. Research status and influencing factors of anodic bonding[J]. Materials Science and Technology, 2018, 26(5): 82-88 (in Chinese).
[48] 胡宇群,董明佳.MEMS阳极键合界面层的力学行为研究进展[J].南京航空航天大学学报,2015,47(4):474-486.
HU Y Q, DONG M J. Research progress on mechanical behavior of MEMS anodic bonding interlayer[J]. Journal of Nanjing University of Aeronautics ＆ Astronautics, 2015, 47(4): 474-486 (in Chinese).