Tribological Properties of Ta-C-N Thin Film Deposited by Magnetron Sputtering

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BULLETIN OF THE CHINESE CERAMIC SOCIETY ›› 2012, Vol. 31 ›› Issue (2): 271-274.

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Tribological Properties of Ta-C-N Thin Film Deposited by Magnetron Sputtering

YAN Xue-hua;YIN Jun;CHENG Xiao-nong

Online:2012-04-15 Published:2021-01-18

Abstract

CLC Number:

TB333

YAN Xue-hua;YIN Jun;CHENG Xiao-nong. Tribological Properties of Ta-C-N Thin Film Deposited by Magnetron Sputtering[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2012, 31(2): 271-274.

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Tribological Properties of Ta-C-N Thin Film Deposited by Magnetron Sputtering

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