BULLETIN OF THE CHINESE CERAMIC SOCIETY ›› 2010, Vol. 29 ›› Issue (6): 1253-1257.
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FAN Ji-long;ZHU Yong-wei;LI Jun;LI Mao;YE Jian-feng;ZUO Dun-wen
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TQ164
FAN Ji-long;ZHU Yong-wei;LI Jun;LI Mao;YE Jian-feng;ZUO Dun-wen. Comparison of Lapping of Silicon Wafer between Fixed-abrasive Pad and Diamond Pellets[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2010, 29(6): 1253-1257.
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