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BULLETIN OF THE CHINESE CERAMIC SOCIETY ›› 2009, Vol. 28 ›› Issue (5): 986-990.

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Research Progress in Preparation and Electric Properties of (Zr, Sn)TiO_4 Thin Films

CHEN Fei;ZHOU Hong-qing;ZHU Hai-kui;WEI Peng-fei;CHEN Dong;LIU Min   

  • Published:2021-01-15

Abstract: From the piont of the increasing requirement on the performance of thin film materials, the crystal structure, preparation technologies, electrical properties of (Zr, Sn)TiO_4 thin films were mainly summarized. It was proposed that the preparation methods would be extended and modified. And the reserch focus was also pionted out.

Key words: (Zr,Sn)TiO_4 thin films%crystal structure%preparation%properties

CLC Number: