CaO-B2O3-SiO2微晶玻璃的制备及介电性能

摘要/Abstract

摘要： 低介电常数、低介电损耗的微晶玻璃是制造低温共烧陶瓷基板的重要材料。本文采用熔融水淬法制备了CaO-B₂O₃-SiO₂(CBS)微晶玻璃,重点研究了m(CaO)/m(SiO₂)质量比、B₂O₃含量对CBS微晶玻璃介电性能的影响。结果表明:CBS微晶玻璃的主要晶相有Ca₃Si₃O₉、Ca₂B₂O₅、CaB₂O₄、SiO₂和Ca₂SiO₄。随着m(CaO)/m(SiO₂)质量比的增加,介电常数增加,介电损耗先降低后增加;硅灰石相的增多使介电损耗从2.87×10^-3降到1.36×10^-3,介电损耗随着SiO₂、Ca₂B₂O₅和CaB₂O₄含量的增加而增大。随着B₂O₃含量的增加,介电常数先增加后减少,而介电损耗则相反。当m(CaO)/m(SiO₂)质量比为0.89、B₂O₃含量为15%(质量分数)时,在900 ℃烧结3 h,CBS微晶玻璃的热膨胀系数为7.16×10^-6 ℃^-1,介电常数为5.85,介电损耗为1.37×10^-3 (10 GHz)。

关键词: CaO-B₂O₃-SiO₂, 微晶玻璃, 介电常数, 介电损耗, 微观结构, 低温共烧

Abstract: Glass-ceramics with low dielectric constant and low dielectric loss is an important material for the manufacture of low temperature cofired ceramic substrates. CaO-B₂O₃-SiO₂ (CBS) glass-ceramics was prepared by melt-water quenching method, and the effects of m(CaO)/m(SiO₂) mass ratio and B₂O₃ content on the dielectric properties of CBS glass-ceramics were studied. The results show that the main crystalline phases of CBS glass-ceramics are Ca₃Si₃O₉, Ca₂B₂O₅, CaB₂O₄, SiO₂ and Ca₂SiO₄. The dielectric constant increases, the dielectric loss decreases first and then increases with the increase of m(CaO)/m(SiO₂) mass ratio. The increase of wollastonite phase decreases the dielectric loss from 2.87×10^-3 to 1.36×10^-3.The dielectric loss increases with the increase of SiO₂, Ca₂B₂O₅ and CaB₂O₄ content. With the increase of B₂O₃ content, the dielectric constant increases first and then decreases, and the dielectric loss is reversed. When m(CaO)/m(SiO₂) mass ratio is 0.89 and B₂O₃ content is 15%(mass fraction), the coefficient of thermal expansion is 7.16×10^-6 ℃^-1, the dielectric constant is 5.85, and the dielectric loss is 1.37×10^-3 (10 GHz) after sintering at 900 ℃ for 3 h.

Key words: CaO-B₂O₃-SiO₂, glass-ceramics, dielectric constant, dielectric loss, microstructure, low temperature co-firing

中图分类号:

TQ174.1

卫志洋, 王晓东, 苏腾, 陈欢乐, 高峰, 苗洋. CaO-B₂O₃-SiO₂微晶玻璃的制备及介电性能[J]. 硅酸盐通报, 2024, 43(4): 1274-1283.

WEI Zhiyang, WANG Xiaodong, SU Teng, CHEN Huanle, GAO Feng, MIAO Yang. Preparation and Dielectric Properties of CaO-B₂O₃-SiO₂ Glass-Ceramics[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2024, 43(4): 1274-1283.

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CaO-B₂O₃-SiO₂微晶玻璃的制备及介电性能

Preparation and Dielectric Properties of CaO-B₂O₃-SiO₂ Glass-Ceramics

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