关键词: AlN粉体;酸洗提纯;金属杂质;氧含量

Abstract: Metal impurity and oxidation are the major factors which affect purity and performance of aluminum nitride (AlN). In this paper,AlN powders were purified by acid-pickling using four kinds of inorganic acids,including phosphoric acid (H3 PO4 ),nitric acid (HNO3 ),hydrofluoric acid (HF)and hydrochloric acid (HCl). The results show that the contents of the metal impurities in the AlN powders could be effectively reduced by acid-pickling. And the mixture of HF and HNO3 has a better purification effect,especially on removing Na,W and Fe impurities. In addition,HF could also reduce oxygen impurity by reacting with Al2O3 . The optimum ratio of HF to HNO3 is determined to be 2:1. Under this condition,the contents of the metal impurities are reduced to less than 100 ppm,and the oxygen content is reduced to 1 . 2 wt%.

Key words: AlN powders;purification by acid-pickling;metal impurity;oxygen content