关键词: Sb:SnO2;磁控溅射;红外反射;热处理

Abstract: The high quality Sb:SnO2 transparent conduction films were deposited on quartz glass by radio frequency magnetron sputtering using the 5Sb2O5· 95SnO2(mol%) ceramic target.The effects of heat treatment temperature on the structure , optical and electrical properties of ATO films were studied .The results show that all the phase structure , crystallinity and properties of ATO films are affected by heat treatment .The grain size of films increases with the increase of the heat treatment temperature , while the sheet resistance decreases until to its'minimum of 9 .3 Ω/□.The infrared reflectivity firstly increases and then decreases with increasing temperature and shows its'maximum ( about 89%) at 600 ℃.The transmittances of films are more than 80%in the visible region and the best sample treated at 600 ℃is up to 91 .3%.

Key words: Sb:SnO2;magnetron sputtering;infrared reflection;heat treatment