无定型Si-C-O-N涂层用于SSiC陶瓷的表面改性研究

硅酸盐通报 ›› 2010, Vol. 29 ›› Issue (1): 248-252.

无定型Si-C-O-N涂层用于SSiC陶瓷的表面改性研究

唐惠东;孙媛媛;李龙珠;谭寿洪

常州工程职业技术学院材料工程技术系,常州,213164;中国科学院上海硅酸盐研究所,上海,200050

出版日期:2010-02-15 发布日期:2021-01-18
基金资助:
国家重点基础研究规划(863项目)资助项目(2006AA03Z539)

Amorphous Si-C-O-N Coating on SSiC Ceramics for Surface Modification

TANG Hui-dong;SUN Yuan-yuan;LI Long-zhu;TAN Shou-hong

Online:2010-02-15 Published:2021-01-18

摘要/Abstract

摘要： 为了改善SSiC陶瓷反射率较低的情况,采用RF磁控溅射法在SSiC陶瓷表面涂覆了无定型Si-C-O-N涂层.借助XRD、FTIR、XPS等手段对涂层进行了表征,并在可见光波长范围内测量了涂层的反射率.结果显示:涂层主要由Si-N、Si-C和Si-O键组成,涂层抛光后其表面缺陷明显减少,表面粗糙度可达埃级,在可见光波段可将反射率的最低值提升至90%.并运用标量散射理论分析了反射率提高的主要原因.

关键词: SSiC;Si-C-O-N涂层;反射率;标量散射理论

Abstract: In order to improve the low reflectance of polished SSiC, the amorphous Si-C-O-N coating was coated on the surface of SSiC ceramics by RF magnetron sputtering. The as-prepared coating was characterized by XRD, FTIR and XPS, et al. The reflectance was also determined in the visible range. The results show that the coating was composed of Si-N, Si-C and Si-O bondings. The surface defects decrease obviously after polished. The surface roughness yields to angstrom grade. The lowest reflectance in visible range increases to 90%. The scalar scattering theory was used to analyze the cause in increasing the reflectance.

Key words: SSiC;Si-C-O-N coating;reflectance;scalar scattering theory

中图分类号:

V254.2

唐惠东;孙媛媛;李龙珠;谭寿洪. 无定型Si-C-O-N涂层用于SSiC陶瓷的表面改性研究[J]. 硅酸盐通报, 2010, 29(1): 248-252.

TANG Hui-dong;SUN Yuan-yuan;LI Long-zhu;TAN Shou-hong. Amorphous Si-C-O-N Coating on SSiC Ceramics for Surface Modification[J]. BULLETIN OF THE CHINESE CERAMIC SOCIETY, 2010, 29(1): 248-252.

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